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Die Technologie der Mikromechanik
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Author(s):
Anton Heuberger
Publication date
(Print):
1989
Publisher:
Springer Berlin Heidelberg
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Hogrefe Medicine
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Thyristoren
Willi Gerlach
(1979)
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Integrierte MOS-Schaltungen
Herbert Weiß
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Karlheinrich Horninger
(1982)
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Book Chapter
Publication date (Print):
1989
Pages
: 83-342
DOI:
10.1007/978-3-642-46621-2_3
SO-VID:
cf4b7165-f7b5-4024-baf0-17cc079f3da1
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Book chapters
pp. 1
Aufgabenstellung der Mikromechanik (Heuberger)
pp. 9
Physikalische Grundlagen der Mikromechanik
pp. 83
Die Technologie der Mikromechanik
pp. 343
Nutzung der Mikromechanik in Anwendungen
pp. 487
Die Mikromechanik als zukünftige Basis der Systemintegration (Heuberger)
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