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Physikalische Grundlagen der Mikromechanik

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Author(s): Anton Heuberger

Publication date (Print): 1989

Publisher: Springer Berlin Heidelberg

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Silicon as a mechanical material

K.E. Petersen (1982)

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Calculated elastic constants for stress problems associated with semiconductor devices

W A Brantley (1973)

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Deformation and fracture of small silicon crystals

W.T. Read, W.L Feldmann, G.L Pearson (1957)

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Publication date (Print): 1989

Pages: 9-81

DOI: 10.1007/978-3-642-46621-2_2

SO-VID: 60ab7368-303d-4f01-99e7-6b1334e0b5a6

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Physikalische Grundlagen der Mikromechanik

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Kindheit, Jugend und Entwicklung

Most cited references 11

Silicon as a mechanical material

Calculated elastic constants for stress problems associated with semiconductor devices

Deformation and fracture of small silicon crystals

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