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Microelectronic Materials and Processes 

Properties and Applications of Silicides

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Author(s): S. P. Murarka

Publication date (Print): 1989

Publisher: Springer Netherlands

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Most cited references 116

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Electrical-Resistivity Model for Polycrystalline Films: the Case of Arbitrary Reflection at External Surfaces

A. F. Mayadas, M. Shatzkes (1970)

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FUNDAMENTAL TRANSITION IN THE ELECTRONIC NATURE OF SOLIDS

T. McGill, C. A. Mead, S. Kurtin (1969)

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Refractory silicides for integrated circuits

S. P. Murarka (1980)

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Publication date (Print): 1989

Pages: 275-323

DOI: 10.1007/978-94-009-0917-5_7

SO-VID: 24875bb9-7771-4990-a6d7-932581770850

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Properties and Applications of Silicides

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Cardiovascular Innovations and Applications

Most cited references 116

Electrical-Resistivity Model for Polycrystalline Films: the Case of Arbitrary Reflection at External Surfaces

FUNDAMENTAL TRANSITION IN THE ELECTRONIC NATURE OF SOLIDS

Refractory silicides for integrated circuits

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