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      Meßmethoden zur Untersuchung ionenimplantierter Schichten

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      Vieweg+Teubner Verlag

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          1978
          : 137-192
          10.1007/978-3-663-05668-3_5
          e9fc8fd9-b3b1-48fc-be7d-bd4f4e5b2646
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