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Meßmethoden zur Untersuchung ionenimplantierter Schichten
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Author(s):
Heiner Ryssel
,
Ingolf Ruge
Publication date
(Print):
1978
Publisher:
Vieweg+Teubner Verlag
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Book Chapter
Publication date (Print):
1978
Pages
: 137-192
DOI:
10.1007/978-3-663-05668-3_5
SO-VID:
e9fc8fd9-b3b1-48fc-be7d-bd4f4e5b2646
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Book chapters
pp. 11
Einleitung
pp. 15
Grundlagen der Ionenimplantation
pp. 40
Probleme bei der Implantation in reale Festkörper
pp. 104
Ionenimplantationsapparaturen
pp. 137
Meßmethoden zur Untersuchung ionenimplantierter Schichten
pp. 193
Eigenschaften ionenimplantierter Halbleiterschichten
pp. 253
Bauelemente
pp. 285
Implantation in Nichthalbleiter
pp. 301
Anhang
pp. 344
Literatur
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